Research

Research & Publications

UPGRADE OF AN INDUSTRIAL Al-BSF SOLAR CELL LINE INTO PERC USING 3600 WAFERS/HOUR ALD Al2O3+SiNX SOLUTION RAMP-UP

2017

1. SoLayTec: F. Souren, B. Dielissen, X. Gay, R. Görtzen
2. Tempress Systems: P. Venema, M. Renes
3. Amtech Systems: J. Luchies

Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells

2022

1. Eindhoven University of Technology: B. Macco, M.L. van de Poll, T.M.P. Broekema, S.B. Basuvalingama, C.A.A. van Helvoirt, W.J.H. Berghuis, R.J. Theeuwes, N. Phunga, W.M.M. Kessels.
2. SALD B.V: B.W.H. van de Loo

Is the Spatial ALD R&D configuration standard?

No. There are a lot of options which can be chosen. These depend on the research which will be done on the system. Many options can be upgraded at a later time, if the research is changed or intensified. Think of more bubblers to evaporate more materials for tertiary processes. Extra co-reactants like O₃ or O₂ plasma or the glovebox for an inert environment.

Is there only manual substrate handling?

No. both R&D systems can be equipped with an automation which can load substrates from a cassette to the substrate table, perform the deposition and take it back to the cassette.