SALD offers reliable and robust roll-to-roll (R2R) and sheet-to-sheet (S2S) systems for high volume coating on flexible and rigid substrates, respectively. These systems will be essential in the energy transition demanding high volume production for the next generation green energy and to boost a Spatial ALD works under atmospheric conditions and can be combined with ozone and oxygen plasma for the best deposition results. The patented deposition head technology delivers the highest coating conformality and uniformity even at high web and substrate speeds. The key added values SALD brings are maximum throughput at the lowest costs, which is achieved by improved coating functionality, efficiency and sustainability. SALD roll-to-roll high throughput systems can be tailored to the specific needs of the flexible film production unit in a standalone web handling system or an integrated unit in a complex modular production system. High speed spatial ALD at 1.5 m/s (90 m/min) has been demonstrated by SALD and development to further speed up of the process to more than 2 m/s (120 m/min) is in progress. Spatial ALD is therefore perfectly compatible with other atmospheric coating techniques! The web handling system to facilitate roll-to-roll processing is developed together with our partner Coatema. SALD sheet-to-sheet high throughput systems can be tailored to the specific needs of the substrate production arrangement and can handle a variety of rigid substrates such as glass plates and wafers. The system can also be operated as a standalone system with dedicated feed-in and feed-out units or can be integrated in a complex modular production line. A throughput of more than 10,000 wafers/hour can be achieved in the sheet-to-sheet production system. Curious about the high volume, scalable coating systems SALD offers? Send us a message for more information about what SALD can add to your production application. High volume production systems
SALD SOLUTIONS
High Volume Production Systems
SALD SOLUTIONS
SALD sheet-to-sheet high throughput systems
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High volume production system
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