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Spatial ALD in Green Hydrogen

SALD Technology

Spatial ALD in Green Hydrogen

Spatial Atomic Layer Deposition (Spatial ALD), an advanced technology for the precise deposition of thin films, plays a crucial role in the production of efficient electrolytic cells for green hydrogen production. This green hydrogen is produced by electrolysis, where water is split into hydrogen and oxygen using electricity, often from renewable and intermittent sources such as solar and wind power. Green hydrogen is then used as a clean fuel for fuel cells in various applications such as transportation, industry, and energy storage.

Loading reduction of precious metals

The amount of active but scarce interface materials, such as nickel, cobalt, ruthenium, platinum, and iridium, can be accurately and uniformly deposited. Loading reduction of a factor of 15 – 20 has been achieved.

Another approach is to deposit ternary or quaternary compounds of specific transition metal oxides containing cobalt, nickel, iron to replace the precious metals.

Surface optimization

The Spatial ALD process has superior coating performance, or high conformality, on porous materials compared to other coating processes. The benefit of porous material is the effective surface enhancement of the electrolytic- and fuel cell. With more m2 coated surface per m2 cell, the energy efficiency will be higher and lowering cost of electrolytic- and fuel cells.

  • PGM loading reduction with a factor of > 20
  • Excellent control of the composition of ternary and quaternary compounds
  • Very uniform coating on 3D (porous) surfaces
  • Cost reduction by energy efficiency improvement

By depositing high-quality thin films on electrodes of fuel cells and electrolytic cells, improving the efficiency of electrolysis and reducing costs by reducing the loading of the electrodes.

No. the technology can be applied on all type of electrolytic cell. This can be AWE, PEM, AEM and SOEC.

Besides PGM materials, also transition metal materials with nickel, iron and cobalt can be used to replace PGM materials and can be applied by spatial ALD. These are called ternary and quaternary compounds. These compounds can be grown using a super cycle or co-dosing approach to control the exact composition of the compound to optimize the catalytic activity.

Hindrik de Vries

System architect


The differences

Temporal ALD vs Spatial ALD

Temporal ALD

  • High-quality 3D layers and suitable for porous substrates.
  • Limited deposition speed
  • Limited in maximum substrates

Spatial ALD

  • High-quality 3D layers and suitable for porous substrates.
  • 100 times faster deposition speed than conventional ALD by our spatial technology in combination with proprietary plasma enhanced deposition
  • Scalable to large areas & flexible substrates
  • Industrially proven, cost-efficient mass production.


Why choose for the R&D Tool?

Improved functionality

Maximum throughput


Lowest possible costs

Improved material reduction

Innovation by working together

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Discover the opportunities that Spatial ALD offers for your sector or project. Are you ready to explore the future of battery technology? Get in touch.

Are you ready to explore new opportunities together? We are!

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