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Scalable Spatial ALD

SALD, worldwide the only company having the expertise to scale up Spatial ALD technology to high volume production

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3D surface topology

Cathode coating

Chemical stability

Eco-friendly innovations

Energy transition

Fuel cell

Barrier layer

Electrolytic cell

Green hydrogen

Energy storage

Higher capacity

Deposition head technology

Conformal coating

Improved material reduction

Circular economy

Battery solutions

Improved functionality

Anode coating

Perovskite

Lithium-Ion battery

Roll-to-roll production line

Lower use of scarce materials

Large-scale impact

Lowest possible costs

Passivation layer

Membrane coating

Nano coating

Portable electronics

Protective layers

Reduce waste

Patented deposition technology

Safety

Maximum throughput

Large-scale coating

SALD Technology

What is Spatial ALD Technology?

Spatial Atomic Layer Deposition (Spatial ALD) delivers a form-following high-quality coating at the atomic level. Compared with conventional ALD, this ingenious technology stacks atomic layers many times faster.

Highest throughput and coating performance at the lowest costs are the key added values Spatial ALD brings. Our in-depth expertise in Spatial ALD technology, combined with our unique ability to swiftly transfer your application from lab to fab, offers you exciting and groundbreaking opportunities in today’s growth markets.

Our technology

Maximum throughput
Lowest costs
Efficient use of material

The differences

Temporal ALD vs Spatial ALD

Temporal ALD

High-quality 3D layers and suitable for porous substrates.

Limited deposition speed
Parasitic backside deposition
Batch process
Vacuum chamber and pumps needed
High cost per substrate

Spatial ALD

High-quality 3D layers and suitable for porous substrates.
100-300 times faster deposition speed by our spatial technology in combination with plasma enhanced deposition
Continuous S2S and R2R process
Atmospheric pressure deposition
Scalable to large areas & flexible substrates
Industrially proven, cost-efficient mass production.

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We know your industry

Our Major Growth Markets

Battery Technology

Solar Energy

Green Hydrogen

Packaging

Are you ready to explore new opportunities together? We are!

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