It is SALD’s ambition to contribute to a more sustainable world and to deliver high volume production systems that will contribute to the green energy transition. Solar cells, batteries, membranes, electrolyzers and many more applications must be scaled to immense volumes. Spatial ALD produces ultra thin high quality coatings with the highest conformality and uniformity moreover spatial ALD simply works under atmospheric conditions. The patented deposition head technology delivers robust processing conditions even at high web or substrate speeds. The key added values SALD brings are the highest film quality at maximum throughput and at the lowest costs.

SALD offers reliable and robust roll-to-roll (R2R) and sheet-to-sheet (S2S) systems for high volume coating on flexible and rigid substrates, respectively.

Roll-to-roll (R2R) SALD

Our R2R concept marks a paradigm shift in R2R spatial atomic layer deposition. The key benefits of SALD’s concept are: independent web transport and efficient gas and precursor supply.

SALD roll-to-roll high throughput systems can be tailored to the specific needs of the flexible film production unit in a standalone web handling system or an integrated unit in a complex modular production system. High speed spatial ALD at 3 m/s (180 m/min) has been demonstrated by SALD and development to further speed up of the process to more than 5 m/s (300 m/min) is in progress. Spatial ALD is therefore perfectly compatible with other atmospheric coating techniques! The web handling system, to facilitate roll-to-roll processing, is developed together with our partner Coatema.